Manufacturer:
FEI/Philips
Type/Model:
XL30 ESEM
SEM:
Tungsten thermal
Detectors:
SE and BSE
Resolution:
3.5 nm @ 30KV (High and Low Vac)
<15nm @ 3KV (Low Vac)
Stage:
4-Axis motorized eucentric
50x50 mm full travel
-15 to 75 degree manual tilt
Vacuum:
Turbo pump with dual mechanical RP
Low Vacuum capable
 
 
 
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